Output energy evolution effects in a pulse-periodic XeCl excimer laser with an average power of ~400 W

An experimental investigation was made of the kinetics of the output energy at different pulse repetition frequencies in a pulse-periodic XeCl excimer laser using He and Ne as the buffer gas component. It was found that the homogeneity of the discharge in the pulse-periodic regime was conserved more readily in an Ne gas mixture than in an He mixture. The highest average power achieved so far for electric-discharge pulse-periodic excimer lasers, ~400 W, was obtained for a two-module XeCl excimer laser utilizing an HCl:Xe:Ne = 1:10:1200 gas mixture. It was established that a reduction in the average output power and the service life of the laser could be due to the formation, in the laser channel, of fine particles which scattered the radiation and promoted formation of an absorbing film on the resonator mirrors.