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Kvantovaya Elektronika, 1977, Volume 4, Number 1, Pages 69–75 (Mi qe8808)  
Laser interferometric profilograph

N. N. Evtikhiev, Yu. A. Snezhko, V. P. Tychinskiĭ, G. R. Levinson, V. P. Zakharov
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Abstract: A report is given of the development of a laser interferometer with a spatial resolution of 15–30μ. designed to measure waviness and deviations from the desired shape of surfaces with class 11–14 finish. Profilograms of various objects are given. The influence of destabilizing factors on the precision of the measurements is analyzed.
Received: 12.04.1976
English version:
Soviet Journal of Quantum Electronics, 1977, Volume 7, Issue 1, Pages 36–39
DOI: https://doi.org/10.1070/QE1977v007n01ABEH008808
Document Type: Article
UDC: 621.378:534.676
PACS: 07.10.+i, 42.60.Kq, 07.60.Ly
Language: Russian


Citation: N. N. Evtikhiev, Yu. A. Snezhko, V. P. Tychinskiĭ, G. R. Levinson, V. P. Zakharov, “Laser interferometric profilograph”, Kvantovaya Elektronika, 4:1 (1977), 69–75 [Sov J Quantum Electron, 7:1 (1977), 36–39]
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    		Квантовая электроника Quantum Electronics
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