Optimization of the average power of pulsed-periodic KrF and XeCl excimer lasers

The possibility is considered of increasing the average power of KrF and XeCl excimer lasers operating in the pulse-periodic regime without raising the circulation velocity of the gas mixture around the closed loop. By improving the homogeneity and stability of the volume discharge, an average power of ~40 W was achieved and laser operation over a period of many hours was obtained.