Theory of laser-induced generation of a periodic surface relief as a result of photochemical etching of semiconductors

A rigorous analytic theory is provided of laser generation of a periodic surface relief by photochemical etching of semiconductors in the case of slight heating of the surface, and also by pyrolytic surface etching reactions and deposition of films absorbing laser radiation. Calculations are reported of increments of an exponential growth of dominant structures with time, and of their periods and orientations as a function of the intensity, angle of incidence, and polarization of the incident radiation, and of the parameters of the treated surface. Theoretical results are shown to agree well with all the available experimental data.