A. A. Malyutin, “Analysis of the applications of the Schwarzschild objective in the soft x-ray and VUV spectral ranges. 2. Diffraction modelling of aberrations”, Kvantovaya Elektronika, 24:2 (1997), 187–189 [Quantum Electron., 27:2 (1997), 182

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Kvantovaya Elektronika, 1997, Volume 24, Number 2, Pages 187–189 (Mi qe806)

This article is cited in 2 scientific papers (total in 2 papers)

Laser applications and other topics in quantum electronics

Analysis of the applications of the Schwarzschild objective in the soft x-ray and VUV spectral ranges. 2. Diffraction modelling of aberrations

A. A. Malyutin

Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow

Full-text PDF (203 kB) Citations (2)

Abstract: An analysis is reported of the use of the Schwarzschild objective in soft x-ray and VUV (2 — 20 nm) microscopy. Estimates are given of the influence of the objective alignment and of the precision of fabrication of spherical mirrors on the resolution of the objective (point spread function, line spread function, and modulation transfer function).

Received: 29.07.1996

English version:
Quantum Electronics, 1997, Volume 27, Issue 2, Pages 182–184
DOI: https://doi.org/10.1070/QE1997v027n02ABEH000806

Bibliographic databases:

Document Type: Article

PACS: 42.15.Fr, 42.30.Lr, 42.79.Bh

Language: Russian

Citation: A. A. Malyutin, “Analysis of the applications of the Schwarzschild objective in the soft x-ray and VUV spectral ranges. 2. Diffraction modelling of aberrations”, Kvantovaya Elektronika, 24:2 (1997), 187–189 [Quantum Electron., 27:2 (1997), 182–184]

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https://www.mathnet.ru/eng/qe806

https://www.mathnet.ru/eng/qe/v24/i2/p187

This publication is cited in the following 2 articles:

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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