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Kvantovaya Elektronika, 1996, Volume 23, Number 7, Pages 637–641 (Mi qe739)  

This article is cited in 12 scientific papers (total in 12 papers)

Interaction of laser radiation with matter. Laser plasma

Laser-assisted etching of the surface of polycrystalline silicon carbide by copper-vapour laser radiation

V. V. Voronov, S. I. Dolgaev, A. A. Lyalin, G. A. Shafeev

A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
Abstract: An investigation was made of laser-assisted (by radiation from a copper vapour laser) etching of polycrystalline silicon carbide in air and in liquid media (water, dimethyl sulfoxide). The maximum etching rate of ceramic SiC in air reached 0.24 μm pulse–1 and in dimethyl sulfoxide it was 0.07 μm pulse–1 when the energy density was 16 J cm–2 in both cases. Scanning electron microscopy and x-ray structure analysis were used to study changes in the morphology and chemical composition of the etched surface of SiC. Etching in air produced partly amorphised silicon carbide and microcrystals of free Si with a characteristic size of about 30 nm. The surface of silicon carbide subjected to laser-assisted etching was capable of chemical reduction of copper from a solution used for chemical metallisation. Copper coatings formed in this way adhered strongly to the surface (adhesion force up to 30 N mm–2).
Received: 01.01.1996
English version:
Quantum Electronics, 1996, Volume 26, Issue 7, Pages 621–625
DOI: https://doi.org/10.1070/QE1996v026n07ABEH000739
Bibliographic databases:
Document Type: Article
PACS: 81.65.Cf, 42.62.Cf
Language: Russian


Citation: V. V. Voronov, S. I. Dolgaev, A. A. Lyalin, G. A. Shafeev, “Laser-assisted etching of the surface of polycrystalline silicon carbide by copper-vapour laser radiation”, Kvantovaya Elektronika, 23:7 (1996), 637–641 [Quantum Electron., 26:7 (1996), 621–625]
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  • This publication is cited in the following 12 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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