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Kvantovaya Elektronika, 1990, Volume 17, Number 7, Pages 931–933 (Mi qe7117)  

This article is cited in 1 scientific paper (total in 1 paper)

Applications of lasers and other topics in quantum electronics

Kinetics of laser-stimulated etching of CdxHg1 – xTe

M. R. Brook, F. V. Bunkin, A. A. Lyalin, G. A. Shafeev
Full-text PDF (955 kB) Citations (1)
Abstract: An experimental investigation was made of laser-stimulated etching of a II-VI semiconductor in liquid solutions containing Br2. Rectangular channels were etched in CdxHg1 – xTe at rates up to 1 cm/s. The spatial resolution of the channels was ~ 5 μm to a depth of ~ 20 μm. The etching kinetics was governed by the thermal diffusion instability of the etchant layer.
Received: 05.04.1989
English version:
Soviet Journal of Quantum Electronics, 1990, Volume 20, Issue 7, Pages 854–856
DOI: https://doi.org/10.1070/QE1990v020n07ABEH007117
Bibliographic databases:
Document Type: Article
UDC: 620.179.111.5:621.373.826
PACS: 79.20.Ds, 81.65.Cf, 66.10.Cb
Language: Russian


Citation: M. R. Brook, F. V. Bunkin, A. A. Lyalin, G. A. Shafeev, “Kinetics of laser-stimulated etching of CdxHg1 – xTe”, Kvantovaya Elektronika, 17:7 (1990), 931–933 [Sov J Quantum Electron, 20:7 (1990), 854–856]
Linking options:
  • https://www.mathnet.ru/eng/qe7117
  • https://www.mathnet.ru/eng/qe/v17/i7/p931
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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    Abstract page:199
    Full-text PDF :77
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