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Multicomponent KrF gas laser operating above atmospheric pressures
W. J. Witteman
Abstract:
A study was made of the dependence of the radiation energy emitted by a coaxial KrF laser pumped by an electron beam on the composition and pressure of the gas mixture. Measurements were made on two-component (Kr–F2), three-component (Ar–Kr–F2), and four-component (Ar–Kr–Ne–F2) gas mixtures. The maximum total pressure mixture was 12 atm. The active volume of the laser was 16 cm3 and the diameter of the anode tube was 1cm. The experiments were carried out using a charging voltage of 280 kV and a current of 7.5 kA; the pulse duration was 30 nsec. A study of the two-component mixtures showed that the maximum output energy corresponded to a partial F2 pressure of 10 mbar so that this pressure was used in all the other measurements. The optimal pressures in the three-component mixtures of gases for a current of about 250 A/cm2 density were 4.5 atm Ar and 0.5 atm Kr, whereas in the case of the two-component mixtures the optimal pressure was 2 atm. A study of the four-component mixtures revealed a positive effect of Ne on the output radiation energy: this energy increased on reduction in the Ar concentration and on increase in the total pressure of the gas mixture. The highest output energy was achieved pAr = 490 mbar and pKr=500 mbar, but the optimal total gas pressure exceeded 12 atm. The physical efficiency of the laser, corresponding to the maximum output radiation energy, was 7%.
Received: 15.12.1985
Citation:
W. J. Witteman, “Multicomponent KrF gas laser operating above atmospheric pressures”, Kvantovaya Elektronika, 13:6 (1986), 1145–1154 [Sov J Quantum Electron, 16:6 (1986), 753–759]
Linking options:
https://www.mathnet.ru/eng/qe6883 https://www.mathnet.ru/eng/qe/v13/i6/p1145
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