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Laser applications and other topics in quantum electronics
Formation of the image of a microstep profile in a heterodyne differential-phase microscope
D. V. Baranov, A. A. Egorov, E. M. Zolotov, K. K. Svidzinsky A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
Abstract:
A theory of the formation of images of microscopic objects of arbitrary shape in a laser heterodyne differential-phase microscope is developed. This theory is used to propose a method for measuring the parameters of step-like microscopic objects with ultrahigh resolution. The experimental results show that this method can be used to analyse deep (h > λ) amplitude—phase steps with the lateral definition better than 0.1 μm.
Received: 01.01.1996
Citation:
D. V. Baranov, A. A. Egorov, E. M. Zolotov, K. K. Svidzinsky, “Formation of the image of a microstep profile in a heterodyne differential-phase microscope”, Kvantovaya Elektronika, 23:4 (1996), 368–369 [Quantum Electron., 26:4 (1996), 360–364]
Linking options:
https://www.mathnet.ru/eng/qe671 https://www.mathnet.ru/eng/qe/v23/i4/p368
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Abstract page: | 108 | Full-text PDF : | 89 |
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