Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator

Experimental and mathematical modeling methods were used in an investigation of the influence of the degree of coherence at the entry to an optical projection system on the quality of the resultant images. It is shown that laser projection lithography is possible in a system with a nonscanning Köhler-type fly's eye illuminator and an excimer laser as the light source.