N. G. Basov, Yu. A. Bykovskiĭ, A. V. Vinogradov, A. A. Galichiĭ, M. P. Kalachnikov, V. L. Kantsyrev, Yu. P. Kozyrev, M. Yu. Mazur, Yu. A. Mikhaĭlov, V. P. Puzyrev, A. V. Rode, G. V. Sklizkov, I. Ya. Frondzeĭ, “Investigation of a laser-plasma source of soft x rays operating at laser power densities 5×1011–2×1014 W/cm2”, Kvantovaya Elektronika, 9:8 (1982), 1525–1529 [Sov J Quantum Electron, 12:8 (1982), 977

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Kvantovaya Elektronika, 1982, Volume 9, Number 8, Pages 1525–1529 (Mi qe5741)

This article is cited in 5 scientific papers (total in 5 papers)

Investigation of a laser-plasma source of soft x rays operating at laser power densities 5×10¹¹–2×10¹⁴ W/cm²

N. G. Basov, Yu. A. Bykovskiĭ, A. V. Vinogradov, A. A. Galichiĭ, M. P. Kalachnikov, V. L. Kantsyrev, Yu. P. Kozyrev, M. Yu. Mazur, Yu. A. Mikhaĭlov, V. P. Puzyrev, A. V. Rode, G. V. Sklizkov, I. Ya. Frondzeĭ

Full-text PDF (1072 kB) Citations (5)

Abstract: A study was made of the efficiency of conversion of target-heating laser radiation into x rays emitted by a plasma in a wide range of laser radiation power densities (5×10¹¹–2×10¹⁴ W/cm²) and atomic numbers of the target material (4–92). Estimates were obtained of the exposure dose needed for x-ray photolithography of resists when such a laser-plasma source of soft x rays was used.

Received: 23.08.1981

English version:
Soviet Journal of Quantum Electronics, 1982, Volume 12, Issue 8, Pages 977–980
DOI: https://doi.org/10.1070/QE1982v012n08ABEH005741

Bibliographic databases:

Document Type: Article

UDC: 621.375.826:621.039.64+537.531

PACS: 52.50.Jm, 52.25.Ps, 78.70.Dm, 85.40.Ci

Language: Russian

Citation: N. G. Basov, Yu. A. Bykovskiĭ, A. V. Vinogradov, A. A. Galichiĭ, M. P. Kalachnikov, V. L. Kantsyrev, Yu. P. Kozyrev, M. Yu. Mazur, Yu. A. Mikhaĭlov, V. P. Puzyrev, A. V. Rode, G. V. Sklizkov, I. Ya. Frondzeĭ, “Investigation of a laser-plasma source of soft x rays operating at laser power densities 5×10¹¹–2×10¹⁴ W/cm²”, Kvantovaya Elektronika, 9:8 (1982), 1525–1529 [Sov J Quantum Electron, 12:8 (1982), 977–980]

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https://www.mathnet.ru/eng/qe5741

https://www.mathnet.ru/eng/qe/v9/i8/p1525

This publication is cited in the following 5 articles:

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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