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Kvantovaya Elektronika, 1991, Volume 18, Number 10, Pages 1226–1228 (Mi qe4298)  

This article is cited in 6 scientific papers (total in 6 papers)

Interaction of laser radiation with matter. Laser plasma

Pulse-periodic laser etching of diamond-like carbon coatings

V. I. Konov, T. V. Kononenko, S. M. Pimenov, A. A. Smolin, N. I. Chapliev
Full-text PDF (825 kB) Citations (6)
Abstract: The rates of etching of α-C:H films by excimer laser radiation were determined in air and in vacuum. Two ablation mechanisms–chemical and physical–dominated in different energy density ranges. An analysis was made of the processes influencing the occurrence of chemical etching and limiting its rate. A comparison was made of the energy losses in the treatment of α-C:H films by cw and pulse-periodic laser radiation.
Received: 12.05.1991
English version:
Soviet Journal of Quantum Electronics, 1991, Volume 21, Issue 10, Pages 1112–1115
DOI: https://doi.org/10.1070/QE1991v021n10ABEH004298
Bibliographic databases:
Document Type: Article
UDC: 621.373.826
PACS: 79.20.Ds, 81.65.Cf, 42.55.Lt, 61.80.Ba
Language: Russian


Citation: V. I. Konov, T. V. Kononenko, S. M. Pimenov, A. A. Smolin, N. I. Chapliev, “Pulse-periodic laser etching of diamond-like carbon coatings”, Kvantovaya Elektronika, 18:10 (1991), 1226–1228 [Sov J Quantum Electron, 21:10 (1991), 1112–1115]
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  • https://www.mathnet.ru/eng/qe4298
  • https://www.mathnet.ru/eng/qe/v18/i10/p1226
  • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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