|
This article is cited in 6 scientific papers (total in 6 papers)
Interaction of laser radiation with matter. Laser plasma
Pulse-periodic laser etching of diamond-like carbon coatings
V. I. Konov, T. V. Kononenko, S. M. Pimenov, A. A. Smolin, N. I. Chapliev
Abstract:
The rates of etching of α-C:H films by excimer laser radiation were determined in air and in vacuum. Two ablation mechanisms–chemical and physical–dominated in different energy density ranges. An analysis was made of the processes influencing the occurrence of chemical etching and limiting its rate. A comparison was made of the energy losses in the treatment of α-C:H films by cw and pulse-periodic laser radiation.
Received: 12.05.1991
Citation:
V. I. Konov, T. V. Kononenko, S. M. Pimenov, A. A. Smolin, N. I. Chapliev, “Pulse-periodic laser etching of diamond-like carbon coatings”, Kvantovaya Elektronika, 18:10 (1991), 1226–1228 [Sov J Quantum Electron, 21:10 (1991), 1112–1115]
Linking options:
https://www.mathnet.ru/eng/qe4298 https://www.mathnet.ru/eng/qe/v18/i10/p1226
|
Statistics & downloads: |
Abstract page: | 200 | Full-text PDF : | 108 |
|