Wide-aperture electron-beam-pumped excimer KrF laser with an output power of 1 GW

A fine-aperture excimer laser module called the Garpun was constructed with an active region of 18 X 20 X 100 cm dimensions. It was pumped from two sides by high-current electron beams. When the laser was pumped by pulses of 100 ns duration and 2 X 25 A/cm² current density, the output energy of a F₂–Kr–Ar mixture was 60 J and the peak power is 1 GW.