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Laser applications and other topics in quantum electronics
Multibeam projection microinterferometer with an image amplifier
A. M. Bakiev, S. Kh. Valiev, N. V. Kryazhev
Abstract:
An experimental investigation was made of the principal properties of a multibeam projection microinterferometer with a copper-vapor image amplifier. The optical system and the operating principle of the microinterferometer are described. It is shown that the lower limit of the height of a microstructure which can be determined is less than 10 nm. If the edges of the microstructure are sharp, the upper limit can reach 5λ, where λ = 0.5782 μm is the wavelength of the radiation of the copper-vapor image amplifier.
Received: 02.01.1992
Citation:
A. M. Bakiev, S. Kh. Valiev, N. V. Kryazhev, “Multibeam projection microinterferometer with an image amplifier”, Kvantovaya Elektronika, 19:8 (1992), 809–812 [Sov J Quantum Electron, 22:8 (1992), 749–752]
Linking options:
https://www.mathnet.ru/eng/qe3589 https://www.mathnet.ru/eng/qe/v19/i8/p809
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Abstract page: | 87 | Full-text PDF : | 50 |
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