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This article is cited in 9 scientific papers (total in 9 papers)
Interaction of laser radiation with matter. Laser plasma
Control of laser machining of polycrystalline diamond plates by the method of low-coherence optical interferometry
V. V. Kononenkoa, V. I. Konova, S. M. Pimenova, P. V. Volkovb, A. V. Goryunovb, V. V. Ivanovb, M. A. Novikovb, V. A. Markelovb, A. D. Tertyshnikb, S. S. Ustavshchikovb a Natural Sciences Center at General Physics Institute of RAS, Moscow
b Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Abstract:
The possibility of applying low-coherence fibre optics interferometry for local contactless measurement of the optical thickness of polycrystalline diamond plates during high-power laser-pulse processing of their rough surface is demonstrated. A unique automated experimental system is developed to control the thickness of samples during ablation of their surface by a scanning 248-nm KrF excimer laser beam. It is shown that this technique is suitable for on-line control of laser polishing and for preparing plane-parallel plates.
Received: 30.09.2004 Revised: 27.05.2005
Citation:
V. V. Kononenko, V. I. Konov, S. M. Pimenov, P. V. Volkov, A. V. Goryunov, V. V. Ivanov, M. A. Novikov, V. A. Markelov, A. D. Tertyshnik, S. S. Ustavshchikov, “Control of laser machining of polycrystalline diamond plates by the method of low-coherence optical interferometry”, Kvantovaya Elektronika, 35:7 (2005), 622–626 [Quantum Electron., 35:7 (2005), 622–626]
Linking options:
https://www.mathnet.ru/eng/qe2902 https://www.mathnet.ru/eng/qe/v35/i7/p622
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