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This article is cited in 2 scientific papers (total in 2 papers)
Interaction of laser radiation with matter
IR multiphoton dissociation of trichlorosilane induced by pulsed CO2 and NH3 laser radiation
V. M. Apatin, V. B. Laptev, E. A. Ryabov Institute of Spectroscopy, Russian Academy of Sciences, Troitsk, Moscow
Abstract:
The IR multiphoton dissociation of trichlorosilane (SiHCl3) molecules irradiated by pulses from CO2 and NH3 lasers is studied. The dependences of dissociation yield on the frequency and energy density of laser radiation, as well as on the parent pressure of SiHCl3, are determined. It is found that HCl and a solid precipitate, probably with a common chemical formula (SiCl2)n, are the main products of dissociation of trichlorosilane.
Received: 16.09.2002 Revised: 05.03.2003
Citation:
V. M. Apatin, V. B. Laptev, E. A. Ryabov, “IR multiphoton dissociation of trichlorosilane induced by pulsed CO2 and NH3 laser radiation”, Kvantovaya Elektronika, 33:10 (2003), 894–896 [Quantum Electron., 33:10 (2003), 894–896]
Linking options:
https://www.mathnet.ru/eng/qe2519 https://www.mathnet.ru/eng/qe/v33/i10/p894
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Abstract page: | 125 | Full-text PDF : | 59 | First page: | 1 |
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