IR multiphoton dissociation of trichlorosilane induced by pulsed CO2 and NH3 laser radiation

The IR multiphoton dissociation of trichlorosilane (SiHCl₃) molecules irradiated by pulses from CO₂ and NH₃ lasers is studied. The dependences of dissociation yield on the frequency and energy density of laser radiation, as well as on the parent pressure of SiHCl₃, are determined. It is found that HCl and a solid precipitate, probably with a common chemical formula (SiCl₂)_n, are the main products of dissociation of trichlorosilane.