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Kvantovaya Elektronika, 2003, Volume 33, Number 8, Pages 689–694 (Mi qe2479)  

This article is cited in 13 scientific papers (total in 13 papers)

Special issue devoted to the memory of academician A M Prokhorov

Excimer laser with highly coherent radiation

V. V. Atezhev, S. K. Vartapetov, A. N. Zhukov, M. A. Kurzanov, A. Z. Obidin

Physics Instrumentation Center, A. M. Prokhorov General Physics Institute, Troitsk, Moscow region
Abstract: Experimental studies aimed at the optimisation of an unstable resonator of an ArF electric-discharge laser are performed. Several optical schemes of an unstable resonator of a single-module laser are proposed and investigated. It is shown that the laser developed on the basis of these schemes is characterised by a high coherence (the spatial coherence length is 1 – 10 mm and the temporal coherence length is 0.5 – 30 mm at a pulse energy of 40 – 290 mJ).
Received: 23.01.2003
English version:
Quantum Electronics, 2003, Volume 33, Issue 8, Pages 689–694
DOI: https://doi.org/10.1070/QE2003v033n08ABEH002479
Bibliographic databases:
Document Type: Article
PACS: 42.55.Lt, 42.25.Kb
Language: Russian


Citation: V. V. Atezhev, S. K. Vartapetov, A. N. Zhukov, M. A. Kurzanov, A. Z. Obidin, “Excimer laser with highly coherent radiation”, Kvantovaya Elektronika, 33:8 (2003), 689–694 [Quantum Electron., 33:8 (2003), 689–694]
Linking options:
  • https://www.mathnet.ru/eng/qe2479
  • https://www.mathnet.ru/eng/qe/v33/i8/p689
  • This publication is cited in the following 13 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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