Application of deformable mirrors in industrial CO2 lasers. I. A mirror with a controllable curvature of the reflecting surface

Single-channel deformable mirrors with a controllable curvature of the reflecting surface are analysed. The advantages of bimorph deformable optics over mirrors controlled by a piezoelectric actuator are demonstrated. Experiments showed that the sensitivity of controllable bimorph mirrors nonlinearly increases (up to 30 %) at high electric voltages; and dynamic operating modes of these mirrors are characterised by an increase in their temperature and capacitance under the action of an alternating control voltage. A focusing laser head (the focal length is 100 – 500 mm) containing a deformable mirror was simulated, and experiments on the control of a focused laser beam were performed.