A capillary discharge plasma source of intense VUV radiation

The results of investigation of a capillary discharge plasma, used as a source of intense VUV radiation and soft X-rays, are presented. The plasma was generated during the discharge of low-inductance condensers in a gas-filled ceramic capillary. Intense line radiation was observed in a broad spectral range (30-400 Å) in various gases (CO₂, Ne, Ar, Kr, Xe). The absolute radiation yield for the xenon discharge was ~5 mJ (2π sr)^-1 pulse^-1 within a spectral band of width 9 Å at 135 Å. Such a radiation source can be used for various practical applications, such as EUV projection lithography, microscopy of biological objects in a 'water window', reflectometry, etc.