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Kvantovaya Elektronika, 2000, Volume 30, Number 8, Pages 710–714 (Mi qe1795)  

This article is cited in 27 scientific papers (total in 27 papers)

Interaction of laser radiation with matter. Laser plasma

Formation of conic microstructures upon pulsed laser evaporation of solids

V. V. Voronov, S. I. Dolgaev, S. V. Lavrishchev, A. A. Lyalin, A. V. Simakin, G. A. Shafeev

Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow
Abstract: The appearance and development of large-scale self-organising microstructures on the surface of monocrystalline Si and several other materials (Ge, Ti) are studied upon their evaporation by 20-ns pulses from a copper vapour laser at 510.6 nm. The structures were formed upon repeated pulsed laser irradiation (~ 104 pulses with an energy density of 1 — 2 J cm-2) in the absence of optical breakdown of the medium above the target surface in the 1 — 105 Pa pressure range in a wide range of angles of laser radiation incidence on the surface. The structures are cones with an apex angle of ~20 — 25°, which grow towards the laser beam. It is shown that the spatial period of the structures developing during laser evaporation is determined by the period of the waves arising on the melt surface and is equal to 10 — 20 μm. The x-ray diffraction analysis showed that the modified substrate region has a polycrystalline structure and consists of crystallites with dimensions ranging from 40 to 70 nm, depending on the pressure of the ambient atmosphere.
Received: 26.01.2000
English version:
Quantum Electronics, 2000, Volume 30, Issue 8, Pages 710–714
DOI: https://doi.org/10.1070/QE2000v030n08ABEH001795
Bibliographic databases:
Document Type: Article
PACS: 42.62.Hk, 61.80.Ba, 81.10.h
Language: Russian


Citation: V. V. Voronov, S. I. Dolgaev, S. V. Lavrishchev, A. A. Lyalin, A. V. Simakin, G. A. Shafeev, “Formation of conic microstructures upon pulsed laser evaporation of solids”, Kvantovaya Elektronika, 30:8 (2000), 710–714 [Quantum Electron., 30:8 (2000), 710–714]
Linking options:
  • https://www.mathnet.ru/eng/qe1795
  • https://www.mathnet.ru/eng/qe/v30/i8/p710
  • This publication is cited in the following 27 articles:
    1. Kaichang Yu, Haichuan Shi, Peilei Zhang, Zhishui Yu, Hua Yan, Qinghua Lu, J Mater Sci, 59:5 (2024), 1819  crossref
    2. V. Yu. Zheleznov, T. V. Malinskii, V. E. Rogalin, Yu. V. Khomich, V. A. Yamshchikov, I. A. Kaplunov, A. I. Ivanova, Russ Microelectron, 52:8 (2023), 741  crossref
    3. V. Yu. Zheleznov, T. V. Malinsky, V. E. Rogalin, Yu. V. Khomich, V. A. Yamshchikov, I. A. Kaplunov, A. I. Ivanova, Izv. vysš. učebn. zaved., Mater. èlektron. teh., 26:2 (2023), 89  crossref
    4. V. Yu. Zheleznov, T. V. Malinsky, S. I. Mikolutsky, V. E. Rogalin, S. A. Filin, Yu. V. Khomich, V. A. Yamshchikov, I. A. Kaplunov, A. I. Ivanova, Russ Microelectron, 50:8 (2021), 649  crossref
    5. Nirgude V.V., Sahu S.K., Int. J. Green Energy, 17:1 (2020), 38–47  crossref  isi  scopus
    6. Vishal V. Nirgude, Santosh K. Sahu, Thermochimica Acta, 694 (2020), 178788  crossref
    7. V. Yu. Zheleznov, T. V. Malinskiy, S. I. Mikolutskiy, V. E. Rogalin, S. A. Filin, Yu. V. Khomich, V. A. Yamshchikov, I. A. Kaplunov, A. I. Ivanova, Izv. vysš. učebn. zaved., Mater. èlektron. teh., 23:3 (2020), 203  crossref
    8. Klass E.V., Opt. Spectrosc., 127:6 (2019), 1098–1103  crossref  isi  scopus
    9. Barmina E.V. Rodin P.I. Serkov A.A. Simakin A.V. Shafeev G.A., Phys. Wave Phenom., 26:2 (2018), 99–108  crossref  isi  scopus
    10. Kotsifaki D.G., Kandyla M., Lagoudakis P.G., Sci Rep, 6 (2016), 26275  crossref  isi  elib  scopus
    11. Barmina E.V., Shafeev G.A., Kuzmin P.G., Serkov A.A., Simakin A.V., Melnik N.N., Appl. Phys. A-Mater. Sci. Process., 115:3 (2014), 747–752  crossref  isi  elib  scopus
    12. Craig A. Zuhlke, Troy P. Anderson, Dennis R. Alexander, Opt. Express, 21:7 (2013), 8460  crossref
    13. M H Mahdieh, M Sobhani, J. Inst., 7:01 (2012), C01076  crossref
    14. D. A. Zuev, O. A. Novodvorsky, E. V. Khaydukov, O. D. Khramova, A. A. Lotin, L. S. Parshina, V. V. Rocheva, V. Y. Panchenko, V. V. Dvorkin, A. Y. Poroykov, G. G. Untila, A. B. Chebotareva, T. N. Kost, M. A. Timofeyev, Appl. Phys. B, 105:3 (2011), 545  crossref
    15. Matthew S. Brown, Craig B. Arnold, Springer Series in Materials Science, 135, Laser Precision Microfabrication, 2010, 91  crossref
    16. Barada K. Nayak, Mool C. Gupta, Optics and Lasers in Engineering, 48:10 (2010), 940  crossref
    17. Brijesh Kumar, R K Soni, Semicond. Sci. Technol., 24:9 (2009), 095007  crossref
    18. Yu. I. Pestov, V. S. Makin, J. Opt. Technol., 75:6 (2008), 371  crossref
    19. S.I. Dolgaev, N.A. Kirichenko, A.V. Simakin, G.A. Shafeev, Applied Surface Science, 253:19 (2007), 7987  crossref
    20. A. V. Simakin, V. V. Voronov, G. A. Shafeev, Phys. Wave Phen., 15:4 (2007), 218  crossref
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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