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This article is cited in 5 scientific papers (total in 5 papers)
Interaction of laser radiation with matter
Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10--18 nm under pulsed laser excitation
A. V. Vodopyanova, S. A. Garakhinb, I. G. Zabrodinb, S. Yu. Zuevb, A. Ya. Lopatinb, A. N. Nechaib, A. E. Pestovb, A. A. Perekalovb, R. S. Pleshkovb, V. N. Polkovnikovb, N. N. Salashchenkob, R. M. Smertinb, B. A. Ulasevichb, N. I. Chkhalob a Federal Research Center The Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod
b Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Abstract:
We have measured the absolute intensities of the spectral lines of Kr, Ar, and O ions (CO$_2$ gas), which are of interest for reflectometry, microscopy, and lithography in the wavelength range of 10--18 nm. We have used pulsed excitation by an Nd : YAG laser with an output wavelength $\lambda$ = 1064 nm, a pulse energy of 0.8 J, a pulse duration of 5.2 ns and a pulse repetition rate of 10 Hz. The targets are formed during gas outflow through a pulsed supersonic conical nozzle for an inlet gas pressure of 3.5 bar. A spectrometer based on X-ray multilayer mirrors and its calibration procedure are described in detail. The absolute intensities of the spectral lines of Kr IX ($\lambda$ = 11.5 nm; number of photons: N = 9.3 $\times$ 10$^{12}$ photons pulse$^{-1}$), Ar VIII ($\lambda$ = 13.84 nm, N = 3 $\times$ 10$^{12}$ photons pulse$^{-1}$), and O VI ($\lambda$ = 12.98 nm, N = 5.17 $\times$ 10$^{12}$ photons pulse$^{-1}$). The results are compared with the data obtained for Xe ions under the same experimental conditions at the same wavelengths.
Keywords:
extreme UV radiation, emission spectra, laser-produced spark, spectrometer, plasma, X-ray multilayer mirror.
Received: 25.02.2021 Revised: 08.06.2021
Citation:
A. V. Vodopyanov, S. A. Garakhin, I. G. Zabrodin, S. Yu. Zuev, A. Ya. Lopatin, A. N. Nechai, A. E. Pestov, A. A. Perekalov, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salashchenko, R. M. Smertin, B. A. Ulasevich, N. I. Chkhalo, “Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10--18 nm under pulsed laser excitation”, Kvantovaya Elektronika, 51:8 (2021), 700–707 [Quantum Electron., 51:8 (2021), 700–707]
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https://www.mathnet.ru/eng/qe17892 https://www.mathnet.ru/eng/qe/v51/i8/p700
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