Limiting spectral and angular characteristics of multilayer relief – phase diffraction microstructures

Methods for estimating the parameters of relief – phase diffraction microstructures (local and integral Q-factors) are extended to the case of multilayer double-relief sawtooth microstructures, which makes it possible to select the best combinations of optical materials for multilayer microstructures at a very low computational burden. An approach to the study of multilayer microstructures is proposed, based on the combined use of Q-factors and the method of rigorous analysis of coupled waves, which allows one to estimate the limiting spectral and angular characteristics of multilayer microstructures of various types.