M. M. Barysheva, S. A. Garakhin, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, S. Yulin, “Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures”, Kvantovaya Elektronika, 49:4 (2019), 380–385 [Quantum Electron., 49:4 (2019), 380

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Kvantovaya Elektronika, 2019, Volume 49, Number 4, Pages 380–385 (Mi qe17026)

This article is cited in 11 scientific papers (total in 11 papers)

Special issue 'Extreme light fields and their interaction with matter'

Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures

M. M. Barysheva^a, S. A. Garakhin^a, S. Yu. Zuev^a, V. N. Polkovnikov^a, N. N. Salashchenko^a, M. V. Svechnikov^a, N. I. Chkhalo^a, S. Yulin^b

^a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^b Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Germany

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Abstract: We have developed the design and experimentally studied aperiodic and stack broadband Mo/Si mirrors for the purposes of the KORTES project, optimised for uniform reflection in the 17–21 nm wavelength range. It is shown that stack structures with an insignificant loss in the reflection coefficient are much more preferable from the point of view of manufacturing and certification, which, in turn, makes it possible to correct the deposition process and to reach the calculated parameters of a multilayer mirror in a small number of iterations.

Keywords: EUV, broadband mirrors, aperiodic structures, block structures, stack structures, magnetron sputtering, inverse problem.

Funding agency	Grant number
Russian Academy of Sciences - Federal Agency for Scientific Organizations	I.1
Russian Foundation for Basic Research	18-32-00173

Received: 06.03.2019

English version:
Quantum Electronics, 2019, Volume 49, Issue 4, Pages 380–385
DOI: https://doi.org/10.1070/QEL16990

Bibliographic databases:

Document Type: Article

Language: Russian

Citation: M. M. Barysheva, S. A. Garakhin, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, S. Yulin, “Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures”, Kvantovaya Elektronika, 49:4 (2019), 380–385 [Quantum Electron., 49:4 (2019), 380–385]

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https://www.mathnet.ru/eng/qe/v49/i4/p380

This publication is cited in the following 11 articles:

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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