Low-coherence interferometry as a tool for monitoring laser micro- and nanoprocessing of diamond surfaces

We have demonstrated the possibility of using low-coherence tandem optical interferometry for monitoring the local laser processing of diamond surfaces. Noncontact measurements of the optical thickness of single-crystal diamond plates were performed directly during the exposure of the surface to repetitive intense laser pulses. We investigated the dynamics of the thinning of a single crystal in two radically different regimes of laser etching: ablation (KrF excimer laser, λ = 248 nm, τ = 20 ns) and nanoablation (Ti : sapphire laser, λ = 266 nm, τ = 100 fs).