|
This article is cited in 1 scientific paper (total in 1 paper)
Interaction of laser radiation with matter. Laser plasma
Modification of the SiO2/Si interface by pulsed fibre laser radiation
A. M. Skvortsova, V. P. Veikoa, C. T. Huynhb, D. S. Polyakova, A. M. Tampera a St. Petersburg National Research University of Information Technologies, Mechanics and Optics
b Quy Nhon University, Viet Nam
Abstract:
We report a detailed study of structural modification of the silicon–silica interface under the effect of laser pulses at a wavelength of 1.07 μm. A thermal oxide layer on the silicon surface has been shown to have a significant effect on the defect formation process and surface microstructuring because of the complex stress state of such a structure.
Keywords:
silicon–silica interface, microstructuring, dislocations, micromelting, fibre laser.
Received: 24.03.2017
Citation:
A. M. Skvortsov, V. P. Veiko, C. T. Huynh, D. S. Polyakov, A. M. Tamper, “Modification of the SiO2/Si interface by pulsed fibre laser radiation”, Kvantovaya Elektronika, 47:6 (2017), 503–508 [Quantum Electron., 47:6 (2017), 503–508]
Linking options:
https://www.mathnet.ru/eng/qe16631 https://www.mathnet.ru/eng/qe/v47/i6/p503
|
Statistics & downloads: |
Abstract page: | 896 | Full-text PDF : | 204 | References: | 47 | First page: | 19 |
|