Effect of structural defects of aperiodic multilayer mirrors on the properties of reflected (sub)femtosecond pulses

The effect of structural defects (for example, of interlayer roughness, layer thickness fluctuations and departures of Mo film density from the tabular one) on the amplitude and phase of the complex reflection coefficient as well as on the amplitude and duration of reflected pulses is numerically studied by the example of a model aperiodic Mo/Si multilayer mirror intended for the compression of a chirped pulse with a spectrum lying in a 50 – 80 eV photon energy range. The departures of Mo film density from the tabular values and film thickness fluctuations are shown to exert the strongest effect on the amplitude and duration of the reflected pulses. The interlayer roughness has a comparable effect on the amplitude of the reflection coefficient, but its effect on the duration of reflected pulses is weaker. Even small film thickness fluctuations may give rise to additional reflected pulses of high intensity, which are delayed in time relative to the principal pulse. The Mo-film density in a Mo/Si mirror is shown to vary from 0.77 to 0.97 (in units of the tabular value for massive molybdenum) as the film thickness varies from 1.5 to 5.5 nm. We discuss the key problems that have to be solved in the development of the fabrication technology of multilayer mirrors with desired characteristics.