X-ray optical system for imaging laser plumes with a spatial resolution of up to 70 nm

We consider an X-ray optical system which permits obtaining laser plume images at a wavelength of 13.5 nm with a resolution of up to 70 nm. The X-ray optical system comprises an X-ray Schwarzschild objective made up of two aspherical multilayer mirrors, a scintillator (YAG:Ce ceramics), which converts X-rays to the visible radiation, and a visible-optical system, which images the scintillator surface onto a CCD camera. The spatial resolution of the system is limited by the resolution of the optical system (0.7 μm) and the magnification (10^×) of the X-ray objective and is as high as 70 nm. The effect of Schwarzschild objective mirror shapes on the spatial resolution is analysed. The profile of concave mirror aspherisation is considered, which provides the attainment of the diffraction-limited quality of the objective. Data are given for the quantum efficiency of the system at a wavelength of 13.5 nm. We describe the experimental test bench intended for studying the developed X-ray optical system and outline the first experimental data which illustrate its efficiency. Owing to the natural division into the 'X-ray' and 'visible' parts, the optical system under discussion permits an easy change of the magnification and the field of view without realigning the X-ray optical elements. The wavelength may be varied in a range between 3 and 40 nm by changing the multilayer mirrors.