Prototype of a high-power, high-energy industrial XeCl laser

We discuss the results of fabrication and experimental study of a high-power excimer XeCl laser for industrial applications. Compactness of the laser is achieved by the employment of a laser chamber based on a ceramic tube made of Al₂O₃. High laser output energy (1.5–2.5 J pulse^-1) is obtained using a wide-aperture (up to 55×30 mm) volume discharge with pre-ionisation by a creeping discharge. The pre-ionisation is realised through a semitransparent electrode by the UV radiation of a creeping discharge in the form of uniform plasma sheet on a surface of a plane sapphire plate. The operating lifetime of the gas mixture amounts to ~57×10⁶ pulses at a stabilised average laser power of 450 W. The results obtained demonstrate real prospects for developing a new class of excimer XeCl lasers with an average power of ~1 kW.