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This article is cited in 5 scientific papers (total in 5 papers)
Laser applications and other topics in quantum electronics
Nanofilm thickness measurement by resonant frequencies
A. N. Latyshev, A. A. Yushkanov Moscow State Region University
Abstract:
We report a theoretical investigation of monochromatic laser light – thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The above coefficients are analysed in the region of resonant frequencies. The resulting formula for the transmission, reflection and absorption coefficients are found to be valid for any angles of incidence. The case of mirror boundary conditions is considered. A formula is derived for contactless measurement of the film thickness by the observed resonant frequencies.
Keywords:
nanofilms, resonant frequencies, transmission, reflection and absorption coefficients of an electromagnetic waves, film thickness.
Received: 08.01.2014 Revised: 10.11.2014
Citation:
A. N. Latyshev, A. A. Yushkanov, “Nanofilm thickness measurement by resonant frequencies”, Kvantovaya Elektronika, 45:3 (2015), 270–274 [Quantum Electron., 45:3 (2015), 270–274]
Linking options:
https://www.mathnet.ru/eng/qe16127 https://www.mathnet.ru/eng/qe/v45/i3/p270
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Abstract page: | 431 | Full-text PDF : | 469 | References: | 55 | First page: | 14 |
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