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Kvantovaya Elektronika, 2015, Volume 45, Number 3, Pages 270–274 (Mi qe16127)  

This article is cited in 5 scientific papers (total in 5 papers)

Laser applications and other topics in quantum electronics

Nanofilm thickness measurement by resonant frequencies

A. N. Latyshev, A. A. Yushkanov

Moscow State Region University
Full-text PDF (592 kB) Citations (5)
References:
Abstract: We report a theoretical investigation of monochromatic laser light – thin metal film interaction. The dependences of transmission, reflection and absorption coefficients of an electromagnetic wave on the incidence angle, layer thickness and effective electron collision frequency are obtained. The above coefficients are analysed in the region of resonant frequencies. The resulting formula for the transmission, reflection and absorption coefficients are found to be valid for any angles of incidence. The case of mirror boundary conditions is considered. A formula is derived for contactless measurement of the film thickness by the observed resonant frequencies.
Keywords: nanofilms, resonant frequencies, transmission, reflection and absorption coefficients of an electromagnetic waves, film thickness.
Received: 08.01.2014
Revised: 10.11.2014
English version:
Quantum Electronics, 2015, Volume 45, Issue 3, Pages 270–274
DOI: https://doi.org/10.1070/QE2015v045n03ABEH015379
Bibliographic databases:
Document Type: Article
PACS: 78.66.-w, 78.67.-n
Language: Russian


Citation: A. N. Latyshev, A. A. Yushkanov, “Nanofilm thickness measurement by resonant frequencies”, Kvantovaya Elektronika, 45:3 (2015), 270–274 [Quantum Electron., 45:3 (2015), 270–274]
Linking options:
  • https://www.mathnet.ru/eng/qe16127
  • https://www.mathnet.ru/eng/qe/v45/i3/p270
  • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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    Abstract page:431
    Full-text PDF :469
    References:55
    First page:14
     
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