N. F. Abramov, O. D. Volpyan, Yu. A. Obod, R. V. Dronskii, “Fabrication of nanogradient coatings for laser devices using the method of magnetron sputtering”, Kvantovaya Elektronika, 43:9 (2013), 791–794 [Quantum Electron., 43:9 (2013), 791

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Kvantovaya Elektronika, 2013, Volume 43, Number 9, Pages 791–794 (Mi qe15218)

This article is cited in 4 scientific papers (total in 4 papers)

Nanogradient dielectric coatings and metamaterials

Fabrication of nanogradient coatings for laser devices using the method of magnetron sputtering

N. F. Abramov^a, O. D. Volpyan^a, Yu. A. Obod^a, R. V. Dronskii^b

^a Polyus Research and Development Institute named after M. F. Stel'makh, Moscow
^b "Fotron-Auto" Scientific Manufacture Enterprise, Moscow

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Abstract: Significant advantages of the magnetron sputtering method for producing complex high-quality optical coatings for laser devices are shown. Technology aspects of efficient fabrication of such coatings are considered. The capabilities of the developed automated technological and control equipment are described.

Keywords: nanogradient coatings, magnetron deposition, thin film elements, optical coatings.

Received: 24.04.2013
Revised: 09.08.2013

English version:
Quantum Electronics, 2013, Volume 43, Issue 9, Pages 791–794
DOI: https://doi.org/10.1070/QE2013v043n09ABEH015218

Bibliographic databases:

Document Type: Article

PACS: 78.67.Pt, 52.77.Dq

Language: Russian

Citation: N. F. Abramov, O. D. Volpyan, Yu. A. Obod, R. V. Dronskii, “Fabrication of nanogradient coatings for laser devices using the method of magnetron sputtering”, Kvantovaya Elektronika, 43:9 (2013), 791–794 [Quantum Electron., 43:9 (2013), 791–794]

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https://www.mathnet.ru/eng/qe15218

https://www.mathnet.ru/eng/qe/v43/i9/p791

This publication is cited in the following 4 articles:

Citing articles in Google Scholar: Russian citations, English citations
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