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Kvantovaya Elektronika, 2013, Volume 43, Number 4, Pages 300–303 (Mi qe15053)  

This article is cited in 4 scientific papers (total in 4 papers)

Extreme light fields and their applications

Fabrication of microcapillaries in fused silica using axicon focusing of femtosecond laser radiation and chemical etching

D. A. Yashunin, Yu. A. Malkov, A. N. Stepanov

Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod
References:
Abstract: Fabrication of microcapillaries with a diameter of 50 — 80 μm and a length up to 2.5 mm in fused silica by axicon focusing of femtosecond laser radiation and subsequent chemical etching in a 8 % hydrofluoric acid solution is demonstrated. The etching rate is ~6 μm min-1. It is shown that the microcapillaries have optical waveguiding properties, which testifies to the optical quality of the walls of obtained structures.
Keywords: femtosecond laser radiation, axicon focusing, microchannels, micromodification of materials, chemical etching.
Received: 12.11.2012
Revised: 12.02.2013
English version:
Quantum Electronics, 2013, Volume 43, Issue 4, Pages 300–303
DOI: https://doi.org/10.1070/QE2013v043n04ABEH015053
Bibliographic databases:
Document Type: Article
PACS: 81.40.Wx, 79.20.Ds, 42.70.Ce, 42.65.Re
Language: Russian


Citation: D. A. Yashunin, Yu. A. Malkov, A. N. Stepanov, “Fabrication of microcapillaries in fused silica using axicon focusing of femtosecond laser radiation and chemical etching”, Kvantovaya Elektronika, 43:4 (2013), 300–303 [Quantum Electron., 43:4 (2013), 300–303]
Linking options:
  • https://www.mathnet.ru/eng/qe15053
  • https://www.mathnet.ru/eng/qe/v43/i4/p300
  • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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