|
This article is cited in 7 scientific papers (total in 7 papers)
Lasers
Elongation of the pulse duration of ArF laser with a solid-state pump generator
S. I. Moshkunov, V. Yu. Khomich, V. A. Yamshchikov Institute of Problems of Electrophysics of the Russian Academy of Sciences, St. Petersburg
Abstract:
The possibility of increasing the pulse duration of an ArF laser (wavelength 193 nm) by using an artificial forming line with nonlinear chokes is studied. An ArF laser (maximum pulse energy 15 mJ, pulse duration 18 ns, pulse repetition rate 1 KHz) with an all-solid-state pump generator is described.
Received: 20.01.2011
Citation:
S. I. Moshkunov, V. Yu. Khomich, V. A. Yamshchikov, “Elongation of the pulse duration of ArF laser with a solid-state pump generator”, Kvantovaya Elektronika, 41:4 (2011), 366–369 [Quantum Electron., 41:4 (2011), 366–369]
Linking options:
https://www.mathnet.ru/eng/qe14543 https://www.mathnet.ru/eng/qe/v41/i4/p366
|
Statistics & downloads: |
Abstract page: | 231 | Full-text PDF : | 128 | References: | 40 | First page: | 1 |
|