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Kvantovaya Elektronika, 2011, Volume 41, Number 7, Pages 631–636 (Mi qe14528)  

This article is cited in 24 scientific papers (total in 24 papers)

Interaction of laser radiation with matter

Study of the spatial resolution of laser thermochemical technology for recording diffraction microstructures

V. P. Veikoa, V. I. Korol'kovb, A. G. Poleshchukb, A. R. Sametovb, E. A. Shakhnoa, M. V. Yarchuka

a St. Petersburg State University of Information Technologies, Mechanics and Optics
b Institute of Automation and Electrometry, Siberian Branch of Russian Academy of Sciences, Novosibirsk
References:
Abstract: The thermochemical method for recording data, which is based on local laser oxidation of a thin metal film with subsequent etching of the unirradiated region, is an alternative to laser photolithography and direct laser removal of the film material. This recording technology is characterised by the absence of thermal and hydrodynamic image distortions, as in the case of laser ablation, and the number of necessary technological operations is much smaller as compared with the photomask preparation in classical photolithography. The main field of application of the thermochemical technology is the fabrication of diffraction optical elements (DOEs), which are widely used in printers, bar-code readers, CD and DVD laser players, etc. The purpose of this study is to increase the resolution of thermochemical data recording on thin chromium films.
Received: 30.12.2010
Revised: 29.03.2011
English version:
Quantum Electronics, 2011, Volume 41, Issue 7, Pages 631–636
DOI: https://doi.org/10.1070/QE2011v041n07ABEH014528
Bibliographic databases:
Document Type: Article
PACS: 61.80.Ba, 42.62.-b, 42.79.Dj
Language: Russian


Citation: V. P. Veiko, V. I. Korol'kov, A. G. Poleshchuk, A. R. Sametov, E. A. Shakhno, M. V. Yarchuk, “Study of the spatial resolution of laser thermochemical technology for recording diffraction microstructures”, Kvantovaya Elektronika, 41:7 (2011), 631–636 [Quantum Electron., 41:7 (2011), 631–636]
Linking options:
  • https://www.mathnet.ru/eng/qe14528
  • https://www.mathnet.ru/eng/qe/v41/i7/p631
    Erratum
    This publication is cited in the following 24 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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    Abstract page:380
    Full-text PDF :192
    References:57
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