Some features of photolithography image formation in partially coherent light

The coherent-noise level in projection images of an opaque-screen sharp edge, formed in the model scheme of photolithography system at different degrees of spatial coherence of screen-illuminating light is studied experimentally. The spatial coherence of laser radiation was reduced by applying a specially developed device, used as a separate functional unit in the system model. The smoothing of the spatial fluctuations of radiation intensity caused by the random spatial inhomogeneity of the initial beam intensity in the obtained images is shown to be highly efficient.