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This article is cited in 2 scientific papers (total in 2 papers)
Laser applications and other topics in quantum electronics
Analysis of the complex response of a heterodyne differential interferometer to a microstep profile
D. V. Baranov, A. A. Egorov, E. M. Zolotov Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow
Abstract:
A fast method for determination of the parameters (height and widths) of a microstep profile was developed. The method is based on a comparison of complex model responses with those obtained experimentally. A superresolution was achieved in determination of the lateral parameters of an object when a priori information on its shape was used.
Received: 15.10.1998
Citation:
D. V. Baranov, A. A. Egorov, E. M. Zolotov, “Analysis of the complex response of a heterodyne differential interferometer to a microstep profile”, Kvantovaya Elektronika, 26:1 (1999), 69–72 [Quantum Electron., 29:1 (1999), 69–72]
Linking options:
https://www.mathnet.ru/eng/qe1414 https://www.mathnet.ru/eng/qe/v26/i1/p69
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Abstract page: | 166 | Full-text PDF : | 71 | First page: | 1 |
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