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Kvantovaya Elektronika, 2010, Volume 40, Number 12, Pages 1141–1145 (Mi qe13990)  

This article is cited in 5 scientific papers (total in 5 papers)

Interferometry

High-sensitive interferometric control of the quality of diffractive elements

A. M. Lyalikov

Yanka Kupala State University of Grodno
References:
Abstract: The prospects of the long lateral shear interferometry for controlling the quality of diffractive elements are shown. In this case, use is made of two diffractive elements, one of which is under investigation, and the other is the model one. A universal device is proposed to control the quality of the diffractive elements of both transmission and reflection types. We present the results of experimental realisation of the technique for the quality control of production of two-dimensional amplitude masks and reflection diffraction gratings.
Received: 21.10.2008
Revised: 12.10.2010
English version:
Quantum Electronics, 2010, Volume 40, Issue 12, Pages 1141–1145
DOI: https://doi.org/10.1070/QE2010v040n12ABEH013990
Bibliographic databases:
Document Type: Article
PACS: 42.87.Bg, 42.79.Dj
Language: Russian


Citation: A. M. Lyalikov, “High-sensitive interferometric control of the quality of diffractive elements”, Kvantovaya Elektronika, 40:12 (2010), 1141–1145 [Quantum Electron., 40:12 (2010), 1141–1145]
Linking options:
  • https://www.mathnet.ru/eng/qe13990
  • https://www.mathnet.ru/eng/qe/v40/i12/p1141
  • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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    References:46
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