T. T. Basiev, A. Ya. Karasik, V. V. Osiko, A. G. Papashvili, D. S. Chunaev, A. V. Gavrilov, M. N. Ershkov, S. N. Smetanin, S. A. Solokhin, A. V. Fedin, V. N. Kolokol'tsev, V. M. Lazorenko, V. I. Tovtin, “Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F2- lasers”, Kvantovaya Elektronika, 39:4 (2009), 385–387 [Quantum Electron., 39:4 (2009), 385

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Kvantovaya Elektronika, 2009, Volume 39, Number 4, Pages 385–387 (Mi qe13909)

This article is cited in 1 scientific paper (total in 1 paper)

Laser technologies

Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F₂^- lasers

T. T. Basiev^a, A. Ya. Karasik^a, V. V. Osiko^b, A. G. Papashvili^a, D. S. Chunaev^a, A. V. Gavrilov^c, M. N. Ershkov^c, S. N. Smetanin^c, S. A. Solokhin^c, A. V. Fedin^c, V. N. Kolokol'tsev^d, V. M. Lazorenko^d, V. I. Tovtin^d

^a Laser Materials and Technology Research Center, Prokhorov General Physics Institute, RAS, Moscow
^b A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
^c Kovrov State Technological Academy
^d A. Baikov Institute of Metallurgy and Materials Science, Russian Academy of Sciences, Moscow

Full-text PDF (120 kB) Citations (1)

Abstract: The picosecond (based on Nd:YLF — LiF:F₂^- crystals) and nanosecond (Nd:YAG — LiF:F₂^-) laser technologies are proposed for perforating closely spaced micron holes in aluminium foil for microelectronics, medicine, and biology. Two-dimensional matrices of holes with diameters of 2 — 20 μm spaced from each other by 8 — 30 μm are obtained in 20-μm-thick aluminium foil. It is shown that it is possible to increase the hole density and decrease their diameter by controlling the laser irradiation regime. A sample of perforated aluminium foil is obtained with the total area of micron holes comprising 30% of the entire surface.

Received: 02.06.2008
Revised: 25.11.2008

English version:
Quantum Electronics, 2009, Volume 39, Issue 4, Pages 385–387
DOI: https://doi.org/10.1070/QE2009v039n04ABEH013909

Bibliographic databases:

Document Type: Article

PACS: 42.62.Cf, 42.55.Rz

Language: Russian

Citation: T. T. Basiev, A. Ya. Karasik, V. V. Osiko, A. G. Papashvili, D. S. Chunaev, A. V. Gavrilov, M. N. Ershkov, S. N. Smetanin, S. A. Solokhin, A. V. Fedin, V. N. Kolokol'tsev, V. M. Lazorenko, V. I. Tovtin, “Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F₂^- lasers”, Kvantovaya Elektronika, 39:4 (2009), 385–387 [Quantum Electron., 39:4 (2009), 385–387]

Linking options:

https://www.mathnet.ru/eng/qe13909

https://www.mathnet.ru/eng/qe/v39/i4/p385

This publication is cited in the following 1 articles:

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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