Damage to the surface of silicon in the solid phase by the action of Nd:YAG laser pulses

An investigation was made of solid-phase damage to the surface of silicon by Nd:YAG laser pulses. The results made it possible to postulate particle emission when the surface of silicon was subjected to laser pulses with the threshold power density I_melt corresponding to the onset of surface melting. Such emission was attributed to the formation of surface microcracks as a result of condensation of nonequilibrium defects under the action of elastic stresses.