D. V. Baranov, A. A. Egorov, E. M. Zolotov, K. K. Svidzinsky, “Determination of the parameters of a microscopic object from a complex response of a differential microscope”, Kvantovaya Elektronika, 25:9 (1998), 838–842 [Quantum Electron., 28:9 (1998), 817

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Kvantovaya Elektronika, 1998, Volume 25, Number 9, Pages 838–842 (Mi qe1334)

Laser applications and other topics in quantum electronics

Determination of the parameters of a microscopic object from a complex response of a differential microscope

D. V. Baranov, A. A. Egorov, E. M. Zolotov, K. K. Svidzinsky

Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow

Full-text PDF (201 kB)

Abstract: An analysis of the amplitude and phase of a complex response of a heterodyne differential microscope was used to demonstrate experimentally the feasibility of determination of the parameters of a composite microscopic object representing a combination of a step with a groove.

Received: 16.09.1997

English version:
Quantum Electronics, 1998, Volume 28, Issue 9, Pages 817–820
DOI: https://doi.org/10.1070/QE1998v028n09ABEH001334

Bibliographic databases:

Document Type: Article

PACS: 07.60.Pb, 42.30.Va

Language: Russian

Citation: D. V. Baranov, A. A. Egorov, E. M. Zolotov, K. K. Svidzinsky, “Determination of the parameters of a microscopic object from a complex response of a differential microscope”, Kvantovaya Elektronika, 25:9 (1998), 838–842 [Quantum Electron., 28:9 (1998), 817–820]

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https://www.mathnet.ru/eng/qe1334

https://www.mathnet.ru/eng/qe/v25/i9/p838

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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