Femtosecond pulsed laser deposition of thin films upon direct and inverse transfer of ablated particles of foam graphite in the nitrogen atmosphere

The comparative study of the preparation of carbon films by the methods of direct and inverse femtosecond laser deposition in the nitrogen atmosphere is performed for the first time. It is found that the surface of the film prepared by the method of inverse laser deposition does not virtually contain microparticles, whereas the surface of the directly deposited film is covered by many microparticles. The dependence of the film-surface roughness parameter on the radius (the distance to the centre of the deposition region) is measured. It is shown that the surface roughness of the film on the inverse collector is smaller than that on the direct collector. The ablation rates of foam graphite and volumes of the material ejected and deposited per laser shot are determined.