Integrated optical demultiplexer based on the SiO2–SiON waveguide structure

An integrated optical demultiplexer based on the SiO₂–SiON waveguide structure and operating in the wavelength range of 1.5 μm is fabricated. The demultiplexer chip has a size 10×10 mm. The parameters of the optical scheme of the device are presented, the technology of its fabrication is described, and the results of measurement of working parameters are given. It is shown that the crosstalk between communication channels (K = 8) does not exceed -25 dB. The operation of the demultiplexer as a selective reflecting mirror is demonstrated. It is shown that it can be used for constructing multifrequency lasers for fibreoptic communication systems.