Abstract:
A novel technique for plasma synthesis of diamond films (and in future of other materials) with the aid of a stationary optical discharge in flowing mixtures of reactant gases was proposed and experimentally implemented. The use of a cw CO2 laser of 2.5 kW power acting on an Xe — H2 — CH4 gaseous mixture, in an atmospheric-pressure reactor developed for the purpose, made it possible to achieve diamond film deposition rates of 30 — 50 μm h–1 on an area of 1 cm2. The characteristic features and advantages of this laser-plasma deposition technique are discussed.
Citation:
V. I. Konov, S. A. Uglov, “Laser-plasma synthesis of diamond films”, Kvantovaya Elektronika, 25:4 (1998), 291–292 [Quantum Electron., 28:4 (1998), 281–282]
Linking options:
https://www.mathnet.ru/eng/qe1212
https://www.mathnet.ru/eng/qe/v25/i4/p291
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