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Kvantovaya Elektronika, 1998, Volume 25, Number 4, Pages 291–292 (Mi qe1212)  

This article is cited in 6 scientific papers (total in 6 papers)

Letters to the editor

Laser-plasma synthesis of diamond films

V. I. Konov, S. A. Uglov

Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow
Full-text PDF (153 kB) Citations (6)
Abstract: A novel technique for plasma synthesis of diamond films (and in future of other materials) with the aid of a stationary optical discharge in flowing mixtures of reactant gases was proposed and experimentally implemented. The use of a cw CO2 laser of 2.5 kW power acting on an Xe — H2 — CH4 gaseous mixture, in an atmospheric-pressure reactor developed for the purpose, made it possible to achieve diamond film deposition rates of 30 — 50 μm h–1 on an area of 1 cm2. The characteristic features and advantages of this laser-plasma deposition technique are discussed.
Received: 27.01.1998
English version:
Quantum Electronics, 1998, Volume 28, Issue 4, Pages 281–282
DOI: https://doi.org/10.1070/QE1998v028n04ABEH001212
Bibliographic databases:
Document Type: Article
PACS: 81.15.Fg, 81.15.Gh, 42.62.Cf
Language: Russian


Citation: V. I. Konov, S. A. Uglov, “Laser-plasma synthesis of diamond films”, Kvantovaya Elektronika, 25:4 (1998), 291–292 [Quantum Electron., 28:4 (1998), 281–282]
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  • https://www.mathnet.ru/eng/qe/v25/i4/p291
  • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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