Operational stability of a compact 600-W KrF laser

The problem of the operational stability of a KrF laser with an average output power of at least 600 W was investigated. An experimental study was made of the dependences of the rms deviation σ of the output energy on the charging voltage, on the pulse repetition rate, and on the operating time. The value of σ varied from 1.2% to 6.0%, depending on the experimental conditions. For an average power of ~600 W, the deviation σ did not exceed 3.2%.