Laser processing of thin films (review)

A review is given of technological developments and physical investigations relating to laser processing of thin films. It is pointed out that this application is one of the most promising in modern laser technology. Special attention is paid to special features of the action of laser radiation on thin-film objects and to general relationships governing the destructive effects. This is used as a basis for the formulation of the criteria which should govern the choice of the laser, optical system, and optimal characteristics of the laser beam.