Optical waveguides formed by ion irradiation of fused quartz

A report is given of the properties and parameters of waveguides formed by irradiation of fused quartz with H$^+_2$, He$^+$, Ar$^+$, and Xe$^+$ ions of energies up to 3 MeV and doses up to $5\times10^{16}$ cm$^{-2}$. The lowest losses ($\sim3$ dB/cm) are reported for waveguides prepared by irradiation with Xe$^+$ ions; subsequent annealing (up to 500$^\circ$ C) can reduce these losses to 50.3 dB/cm. The implantation of H$^+_2$ is not recommended because waveguides prepared in this way exhibit spontaneous annealing.