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This article is cited in 2 scientific papers (total in 2 papers)
Brief Communications
Evaporation of films of chemical elements with a neodymium glass laser
V. M. Boyakov, V. M. Epikhin, B. A. Kalin, M. K. Makhatov, I. N. Nikolaev, G. N. Shishkin
Abstract:
Thin films were evaporated using a quasi-cw neodymium glass laser. Thin (~10 nm) uniform-thickness films of many elements were deposited using laser radiation intensities q >1 MW/cm2. These films were mainly polycrystalline.
Received: 11.11.1977
Citation:
V. M. Boyakov, V. M. Epikhin, B. A. Kalin, M. K. Makhatov, I. N. Nikolaev, G. N. Shishkin, “Evaporation of films of chemical elements with a neodymium glass laser”, Kvantovaya Elektronika, 5:7 (1978), 1582–1584 [Sov J Quantum Electron, 8:7 (1978), 902–904]
Linking options:
https://www.mathnet.ru/eng/qe10475 https://www.mathnet.ru/eng/qe/v5/i7/p1582
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Abstract page: | 124 | Full-text PDF : | 70 |
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