Influence of vibrational relaxation on the quantum efficiency of a KrF excimer laser

A theoretical analysis is made of the kinetics of electronic–vibrational relaxation of excimer molecules in the active medium of a KrF laser. Equations are derived to describe the dependence of the lasing quantum efficiency on the photon flux in the resonator, on the mechanism of formation of electronically excited molecules, and on the composition of the active gas mixture.