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This article is cited in 1 scientific paper (total in 1 paper)
LASER SYSTEM COMPONENTS AND DEVICES. CAVITIES, MIRRORS
Spectral characteristics of multilayer cobalt—carbon mirrors for the λ ≈ 7.5 nm range
N. N. Kolachevskya, E. Louisb, E. Spillerc, M. M. Mitropol'skiia, F. Bijkerkb, E. N. Ragozina a P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow
b FOM Institute for Plasma Physics Rijnhuizen, Nieuwegein, The Netherlands
c IBM T. J. Watson Research Center, New York, USA
Abstract:
Multilayer cobalt—carbon mirrors on Si(111) substrates were made by electron-beam deposition and polishing of the metal layers by Kr+ ion bombardment. A new spectroscopic method was developed for estimating the parameters of plane multilayer x-ray mirrors by illuminating a sample with broad-band radiation from a laser-plasma source and by subsequent dispersion of this radiation with a diffraction grating operating in the transmission mode.
Received: 14.11.1996
Citation:
N. N. Kolachevsky, E. Louis, E. Spiller, M. M. Mitropol'skii, F. Bijkerk, E. N. Ragozin, “Spectral characteristics of multilayer cobalt—carbon mirrors for the λ ≈ 7.5 nm range”, Kvantovaya Elektronika, 24:8 (1997), 731–735 [Quantum Electron., 27:8 (1997), 712–716]
Linking options:
https://www.mathnet.ru/eng/qe1025 https://www.mathnet.ru/eng/qe/v24/i8/p731
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Abstract page: | 169 | Full-text PDF : | 191 |
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