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Kvantovaya Elektronika, 1997, Volume 24, Number 8, Pages 731–735 (Mi qe1025)  

This article is cited in 1 scientific paper (total in 1 paper)

LASER SYSTEM COMPONENTS AND DEVICES. CAVITIES, MIRRORS

Spectral characteristics of multilayer cobalt—carbon mirrors for the λ ≈ 7.5 nm range

N. N. Kolachevskya, E. Louisb, E. Spillerc, M. M. Mitropol'skiia, F. Bijkerkb, E. N. Ragozina

a P. N. Lebedev Physical Institute, Russian Academy of Sciences, Moscow
b FOM Institute for Plasma Physics Rijnhuizen, Nieuwegein, The Netherlands
c IBM T. J. Watson Research Center, New York, USA
Full-text PDF (204 kB) Citations (1)
Abstract: Multilayer cobalt—carbon mirrors on Si(111) substrates were made by electron-beam deposition and polishing of the metal layers by Kr+ ion bombardment. A new spectroscopic method was developed for estimating the parameters of plane multilayer x-ray mirrors by illuminating a sample with broad-band radiation from a laser-plasma source and by subsequent dispersion of this radiation with a diffraction grating operating in the transmission mode.
Received: 14.11.1996
English version:
Quantum Electronics, 1997, Volume 27, Issue 8, Pages 712–716
DOI: https://doi.org/10.1070/QE1997v027n08ABEH001025
Bibliographic databases:
Document Type: Article
PACS: 07.85.Fv, 81.15.Ji
Language: Russian


Citation: N. N. Kolachevsky, E. Louis, E. Spiller, M. M. Mitropol'skii, F. Bijkerk, E. N. Ragozin, “Spectral characteristics of multilayer cobalt—carbon mirrors for the λ ≈ 7.5 nm range”, Kvantovaya Elektronika, 24:8 (1997), 731–735 [Quantum Electron., 27:8 (1997), 712–716]
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  • https://www.mathnet.ru/eng/qe1025
  • https://www.mathnet.ru/eng/qe/v24/i8/p731
  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Квантовая электроника Quantum Electronics
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