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This article is cited in 1 scientific paper (total in 1 paper)
Test of a new tip material for Langmuir probe diagnostic
M. Y. Nazab, Sh. Shukrullahab, A. Ghaffarb, N. U. Rehmancd, Y. Khane a Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750, Malaysia
b University of Agriculture, Faisalabad, 38040, Pakistan
c King Saud University, Riyadh, 11451, Kingdom of Saudi Arabia
d COMSATS Institute of Information Technology, Islamabad, Pakistan
e College of Engineering, King Saud University, Riyadh, 11451, Saudi Arabia
Abstract:
The objective of the work is to test a nickel-chrome alloy as a probe tip material for characterization of discharge plasmas. In order to meet the objective, a symmetric triple Langmuir probe diagnostic system and an associated driving circuit are designed and tested in an inductively coupled plasma generated by a 13.56-MHz radio frequency source coupled with an automated impedance match network. This probe is used to measure the electron temperature, electron number density, and ion saturation current as functions of the input power of the radio frequency source and the filling gas pressure. An increasing trend is noticed in the electron temperature and electron number density with an increase in the input power, whilst a decreasing trend is evident in these parameters with an increase in the nitrogen gas pressure. The overall inaccuracies in electron temperature and electron number density measurements are 5–12% and 3–13%, respectively.
Keywords:
multi-tip probes, electron number density, electron temperature, radio frequency plasmas.
Received: 18.11.2013 Revised: 31.01.2014
Citation:
M. Y. Naz, Sh. Shukrullah, A. Ghaffar, N. U. Rehman, Y. Khan, “Test of a new tip material for Langmuir probe diagnostic”, Prikl. Mekh. Tekh. Fiz., 57:2 (2016), 23–31; J. Appl. Mech. Tech. Phys., 57:2 (2016), 211–218
Linking options:
https://www.mathnet.ru/eng/pmtf852 https://www.mathnet.ru/eng/pmtf/v57/i2/p23
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