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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 2018, Volume 59, Issue 5, Pages 115–122
DOI: https://doi.org/10.15372/PMTF20180514 (Mi pmtf531) 		 
Measuring the temperature and concentration secondary electrons in an argon electron-beam plasma

V. O. Konstantinov, V. G. Shchukin, R. G. Sharafutdinov

Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia
Full-text PDF (331 kB)
DOI: https://doi.org/10.15372/PMTF20180514
Abstract: The results of temperature and concentration measurements of secondary electrons in a free jet of argon, activated in an electron beam plasma, carried out using a Langmuir double electrostatic probe. A cold plasmotron prototype with a primary beam energy of 1 keV is used obtain a jet of dense cold plasma with a transverse size of approximately 80 mm and parameters with which silicon layers may be deposited with necessary characteristics in a forvacuum pressure range.
Keywords: probe diagnostics, electron-beam plasma, hollow cathode electron gun.
Funding agency Grant number
Russian Foundation for Basic Research 17-48-540665 р а
Received: 20.12.2017
Revised: 22.03.2018
English version:
Journal of Applied Mechanics and Technical Physics, 2018, Volume 59, Issue 5, Pages 867–873
DOI: https://doi.org/10.1134/S0021894418050140
Bibliographic databases:
Document Type: Article
UDC: 533.9.082.76
Language: Russian
Citation: V. O. Konstantinov, V. G. Shchukin, R. G. Sharafutdinov, “Measuring the temperature and concentration secondary electrons in an argon electron-beam plasma”, Prikl. Mekh. Tekh. Fiz., 59:5 (2018), 115–122; J. Appl. Mech. Tech. Phys., 59:5 (2018), 867–873
Citation in format AMSBIB
\Bibitem{KonShcSha18}
\by V.~O.~Konstantinov, V.~G.~Shchukin, R.~G.~Sharafutdinov
\paper Measuring the temperature and concentration secondary electrons in an argon electron-beam plasma
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2018
\vol 59
\issue 5
\pages 115--122
\mathnet{http://mi.mathnet.ru/pmtf531}
\crossref{https://doi.org/10.15372/PMTF20180514}
\elib{https://elibrary.ru/item.asp?id=35606608}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2018
\vol 59
\issue 5
\pages 867--873
\crossref{https://doi.org/10.1134/S0021894418050140}
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